Электронная библиотека (репозиторий) Томского государственного университета
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Optical properties of aluminum- and silicon-nitride films and Al–Si–N nanocomposite coatings deposited by reactive magnetron sputtering 402 403 2
Effect of short-pulsed ion irradiation on the optical and electrical properties of titanium nitride films deposited by reactive magnetron sputtering 671 672 2
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Kabyshev, A. V.

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Kabyshev, A. V.

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